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为克服静电致动微夹持器夹持力小、运动范围小的弱点,设计并研制了一种基于体硅工艺的微夹持器。建立了S形柔性夹持臂力学模型,借助有限元方法进行结构优化、夹持臂模态分析以及静电驱动器对微操作对象影响的估算。研制成一种大深宽比梳状静电驱动微夹持器,释放了等效长度达5.470mm的柔性夹持臂。该夹持器采用了导电型并接地连接的柔性微夹持臂,可防止静电对操作的影响,柔性结构有效解决了静电力小与硅材料的弹性模量高之间的矛盾,使微夹持器的夹持力输出大大增加。
In order to overcome the weak electrostatic force microgripper clamping force and small movement range, a microgripper based on bulk silicon technology was designed and developed. The mechanical model of the S-shaped flexible clamping arm is established. The structural optimization, the modal analysis of the clamping arm and the estimation of the influence of the electrostatic actuator on the micro-operation object are carried out by means of the finite element method. Developed a large aspect ratio comb electrostatic driven micro-gripper, the release of the equivalent length of flexible clamping arm 5.470mm. The holder uses a conductive and grounded flexible micro-clamping arm to prevent the impact of static electricity on the operation, the flexible structure effectively solves the small electrostatic force and high elastic modulus of silicon material between the contradiction between the micro-clip Holder clamping force output greatly increased.