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利用偏压/射频耦合等离子体增强化学气相沉积技术在聚对苯二甲酸乙二醇酯(简称聚酯,PET)筒内壁制备了类金刚石薄膜(DLC)。采用X射线光电子能谱、扫描电子显微镜、三维表面轮廓仪、紫外/可见光分光光度计和气体渗透率测试仪考察了射频功率对类金刚石薄膜的结构、沉积速率、表面形貌、光学透过率和气体阻隔性能的影响。结果表明,膜层沉积可有效阻挡近紫外区域的光线,同时对O2,CO2的阻隔能力明显提高,这是由于DLC膜层的致密性质以及PET表面原有缺陷的覆盖。与未镀膜PET相比,150 W时制备的DLC膜的气体透过率分别从58.5,61.7cm3m-2atm-1d-1降低至0.7,1.5 cm3m-2.atm-1d-1,相应的对O2,CO2的阻隔率分别可以提高80倍和40倍。
Diamond-like carbon films (DLC) were prepared on the inner wall of polyethylene terephthalate (PET) tube by the bias / RF coupled plasma enhanced chemical vapor deposition technique. X-ray photoelectron spectroscopy, scanning electron microscopy, three-dimensional surface profiler, UV / visible spectrophotometer and gas permeability tester were used to investigate the effect of RF power on the structure, deposition rate, surface morphology, optical transmittance And gas barrier properties. The results show that the deposition of the film can effectively block the light in the near ultraviolet region and significantly improve the barrier capability of O2 and CO2 due to the dense nature of the DLC film and the original defect coverage of the PET surface. Compared with uncoated PET, the gas permeability of DLC films prepared at 150 W decreased from 58.5,61.7cm3m-2atm-1d-1 to 0.7,1.5cm3m-2.atm-1d-1, respectively, , CO2 barrier rate can be increased 80 times and 40 times.