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使用迴旋质谱计分析了磁控管起振前,起振后各种工作状态下的残余气体的变化。磁控管中分别装有镍海绵氧化物阴极和钡钨浸渍阴极。阴极预热可使磁控管内各种气体大量增加,管内真空度下降2个数量级以上。支取直流或脉冲电流时惰性气体大量减少,但活性气体有所增加。阳块通水冷却对活性气体减少有明显效果。加上临界磁场后,电子回轰加激了残余气体的变化。磁控管起振后不论惰性气体,还是活性气体都有大小不同的增加,而且残余气体的变化规律与器件的输出功率,脉冲宽度以及重复频率有密切关联。在脉宽大到一定值后磁控管打火增激,工作不稳定,输出功率下降,频谱畸变等性能的恶化和气体的大量增加有一定关系。起振后降低灯丝加热功率对改善真空组成有利。镍海绵氧化物阴极的磁控管在静置存放11个月后管内残余气体有所增加,但除通过玻璃渗透的氦之外数量不大,不足以对器件和阴极性能有明显作用。对比了钡钨阴极和镇海绵阴极管子中的气氛差异。本工作的结果表明迴旋质谱计可以适用于研究大多数微波器件在工作状态时的气氛变化,展示了使用气体分析工具探索改进工艺措施,提高器件性能和寿命的可能性。讨论了今后的工作。
The cyclotron mass spectrometer was used to analyze the variation of residual gas in various working conditions before and after the magnetron was started up. Magnetron were equipped with nickel sponge oxide cathode and barium-tungsten impregnated cathode. Cathode preheating can make a large increase in a variety of gases within the magnetron, the vacuum tube decreased more than 2 orders of magnitude. When withdrawing DC or pulsed current, the inert gas is greatly reduced, but the active gas is increased. Yang block water cooling on the active gas reduction has a significant effect. Coupled with the critical magnetic field, the electron back to the boom stimulated the residual gas changes. Magnetron magnetization regardless of inert gas, or reactive gas has a different size increases, and the variation of residual gas and device output power, pulse width and repetition frequency are closely related. After the pulse width reaches a certain value, the magnetron ignites and stimulates, the work is unstable, the output power is reduced, the spectral distortion and other properties are deteriorated and the gas is greatly increased. Lowering the heating power of the filament after starting up is good for improving the vacuum composition. There was an increase in residual gas in the tube after 11 months of storage in the cathode of a nickel sponge oxide, but the small amount of helium in addition to glass penetrated by the glass was not enough to have a significant effect on device and cathode performance. The differences in atmospheres between barium tungsten cathodes and town sponge cathode tubes were compared. The results of this work indicate that the cyclotron spectrometer can be used to study the change of atmosphere in the working condition of most microwave devices. It shows the possibility of using gas analysis tools to explore the improvement of process measures and the improvement of device performance and lifetime. Discussed the future work.