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主要从实验角度研究了在波长780 nm飞秒激光作用下石英的烧蚀,给出了石英烧蚀孔径与能量的关系,计算出石英的烧蚀阈值为1.06 J/cm~2。并研究了光阑对孔径的影响,能量、扫描速度、扫描次数与微槽宽度和微槽深度的关系。
The ablation of quartz at 780 nm femtosecond laser was studied experimentally. The relationship between the ablation aperture and the energy of quartz was given. The ablation threshold of quartz was calculated to be 1.06 J / cm ~ 2. The influence of diaphragm on the aperture, the energy, the scanning speed, the number of times of scanning and the relationship between the width of microgrooves and the depth of microgrooves were studied.