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利用磁悬浮技术将铁磁性平台悬浮在磁场中 ,通过线性电机无接触驱动 ,结合控制技术实现平台的快速精密定位。合理的设计将悬浮力和导向力两个磁悬浮系统合二为一 ,即结构简单 ,控制容易又能获得精确的导向精度。选用线性同步电机 ,避免了感应电机磁场感应所产生的法向力对平台的振动作用 ,有利于悬浮系统的控制。悬浮系统无接触 ,无摩擦 ,克服了磨损、金属粉尘及油脂污染等问题 ;无接触线性驱动减少了机械联结件 ,消除了联结间隙 ,减轻了重量 ,能有效提高动态响应频率和定位精度 ;这些使定位平台能够满足现代信息产业对超洁净制作环境和高精度、高效率的要求
The use of magnetic levitation technology will be suspended in the magnetic field of the magnetic platform, through the linear motor contactless drive, combined with control technology to achieve rapid precision platform positioning. Reasonable design combines the two levitation systems of levitation force and guiding force, that is, the structure is simple, the control is easy, and precise guidance precision can be obtained. The selection of linear synchronous motor, to avoid the induction motor induced by the magnetic field generated by the normal force of the platform vibration, is conducive to the suspension system control. The contactless and frictionless suspension system overcomes the problems of abrasion, metal dust and oil pollution. The contactless linear drive reduces the mechanical coupling, eliminates the connection gap, reduces the weight and effectively improves the dynamic response frequency and positioning accuracy. These So that the positioning platform to meet the modern information industry on ultra-clean production environment and high-precision, high efficiency requirements