一、以往真空度的测量方法过去,对真空容器中真空度的测量,在工业上广泛使用的仪器有:冷阴极直流真空计,如磁控管型、反磁控管型、二者组合型或者冷阴极电离真空计等。这些装置的结构都是在真空容器内设置一对相互分离的电极,利用外加的高电压,同时,在与电场垂直的方向加磁场,使其连续放电,根据放电电流来测量真空度。由于这种测量方法采用直流连续式放电,因而当电极被腐蚀、污染时,会使测量精度降低,并因在放电时,所产生的固有的排气和放气现象,会使真空度急剧变化,因此,不可能正确地测量出真空度, First, the past, the degree of vacuum measurement method In the past, the vacuum degree of vacuum vessel measurements, widely used in industry instruments are: cold cathode DC vacuum gauge, such as magnetron-type, reverse magnetron type, the combination of the two Or cold cathode ionization gauge. These devices are constructed by providing a pair of electrodes separated from each other in a vacuum vessel and applying a high voltage thereto while applying a magnetic field in the direction perpendicular to the electric field to discharge them continuously and measuring the degree of vacuum based on the discharge current. Since this method of measurement uses DC continuous discharge, when the electrode is corroded and contaminated, the accuracy of measurement is lowered. Due to the inherent discharge and deflation phenomena during discharge, the degree of vacuum changes drastically Therefore, it is impossible to correctly measure the degree of vacuum,