国外研制成一种新型的,E型方硅杯光纤压力传感器。图1简要地说明了这个传感器的工作原理。光源在传感器外部,它可以是卤灯,也可以是阳光或激光,E型方硅杯上横有一根光纤,在光纤末端的E型方硅杯边缘处制作了一个光敏二极管。当E型硅杯受到不同压力时,光纤的末端就按照杯底膜片挠曲的大小,在垂直于膜片的方向上产 Foreign developed a new type, E-type square cup optical fiber pressure sensor. Figure 1 briefly shows how this sensor works. The light source is external to the sensor, which can be a halogen lamp or a sun or laser. An E-type square silicon cup has an optical fiber transverse to it. A photodiode is made at the edge of the E-shaped square silicon cup at the end of the fiber. When the E-shaped silicon cup under different pressures, the end of the fiber in accordance with the size of the bottom of the diaphragm deflection in the direction perpendicular to the film production