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大口径凸非球面镜在现代光学系统的应用日渐广泛,尤其在离轴三反光学系统中,它往往作为次镜使用。出于力学特性和热学特性考虑,一般采用不透明的Si C材料来制作此类非球面镜面,而且对于离轴系统,次镜的全口径均参与成像。口径大、加工材料不透明且无中心遮拦,使得传统的检测方法已经无法实现对此类非球面的检测。为解决此问题,提出一种计算机再现全息(CGH)与辅助球面镜混合补偿的凸非球面检测方法,构建了基于CGH辅助功能区域的检测对准方案,并以此方法对一口径为φ120 mm的Si C凸非球面反射镜进行了混合补偿检测,其检测结果与子孔径拼接检测结果在均方根(RMS)值为1/50λ精度下一致,验证了该方法的可行性与正确性。
Large-aperture aspherical aspheric lenses are increasingly used in modern optical systems, especially in off-axis three-mirror systems, which are often used as secondary mirrors. For mechanical and thermal reasons, opaque Si C materials are commonly used to make such aspherical mirrors, and for off-axis systems, the full aperture of the secondary mirror is involved in imaging. Large caliber, opaque processing of materials and no obscure center, making the traditional detection methods have been unable to achieve such aspheric detection. In order to solve this problem, this paper proposes a convex aspheric surface detection method based on computer-aided hologram (CGH) and an auxiliary spherical mirror. A detection and alignment scheme based on the CGH auxiliary functional area is constructed. In this method, Si C aspherical aspheric mirror. The results of the detection and sub-aperture splicing detection are consistent with the RMS value of 1 / 50λ, which verifies the feasibility and correctness of the proposed method.