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测量过程中,测量的准确程度与测量仪器间的作用力是极其重要的,为此需准确测量微纳尺度材料的机械、电子、磁、光以及化学特性.同时,扫描探针显微镜(Scanning Probe Microscope,SPM)及其相关技术拥有确定探针针尖与样品间作用力的能力,因此,本文主要就微纳尺度的高精度SPM测量技术及仪器做一简单的介绍和回顾.首先介绍了原子力显微镜(Atomic Force Microscope,AFM)、扫描隧道显微镜(Scanning Tunnel Microscope,STM)及其相关技术原理,其次重点介绍了常温/低温STM、自旋极化(Spin Polarization,SP)-STM、AFM等仪器本身的关键技术及搭建难点,并介绍了运用上述仪器取得的典型成果;再次,介绍了国内外运用极端环境(超低温、超高真空)与常温、大气环境的AFM、STM在特殊区域微纳尺度测量、基于探针技术的微纳电子器件表征与控制,以及SPM操控技术的典型成果最新进展;最后,介绍了本研究小组运用超高真空AFM在磁性材料表征与测量方面的进展.总之,通过本文对SPM高精度测量及其应用的回顾与介绍,对SPM的关键组成部分、关键技术及最新发展有了更深的认识.SPM的先进性、用户的友好体验以及具有鲜明应用指向性的特点,有望在原子/分子科学、纳机电系统(Nanoelectro Mechanical System,NEMS)等领域有重要的应用.
In the process of measurement, the accuracy of the measurement and the force between the measuring instruments are extremely important, so the mechanical, electronic, magnetic, optical and chemical properties of the micro-nano-scale materials must be accurately measured. Meanwhile, the scanning probe microscope Microscope, SPM) and related technologies have the ability to determine the force between the probe tip and the sample.Therefore, this paper mainly introduces and reviews the micro-nano-scale high-precision SPM measurement technology and instrument.Firstly, the atomic force microscope Atomic Force Microscope (AFM), Scanning Tunnel Microscope (STM) and its related technical principles are introduced. Secondly, STM, Spin Polarization (SP) -STM and AFM And introduces the typical results obtained by using the above instruments. Thirdly, AFM and STM are introduced in the special area with extreme environment (ultra-low temperature and ultra-high vacuum) and atmospheric environment at home and abroad, , Characterization and control of micro and nano electronic devices based on probe technology, and the latest progress of typical results of SPM control technology; finally, The team made progress in the characterization and measurement of magnetic materials using ultra-high vacuum AFM. In summary, through the review and introduction of SPM high-accuracy measurement and its application, the author has made a deeper understanding of the key components, key technologies and latest developments of SPM The advanced nature of the SPM, its user-friendly experience and its distinctive application orientation are expected to have important applications in such fields as atomic / molecular science and nanoelectromechanical systems (NEMS).