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对于一台电子束曝光系统来说,关键的问题是待曝光的基片相对于电子束扫描区域能够精确地定位。高精度要求x y工件台能够精确地定位,并且装片夹板可以以稳定及可重复性方式装片。采用将掩模或晶片定位于光路系统的每一个曝光区域的方法,工件台完成电子束系统的步进一重复功能。工件台的定位精度严格受到系统可能做到的小的几何结构限制。装片夹板就是一个框架。它能夹住基片。它提供了将基片放在工件台上和在装卸过程中保护基片的方法,以及使作图表面与工件台电接触。
A key issue for an electron beam exposure system is that the substrate to be exposed can be precisely positioned with respect to the electron beam scanning area. The high accuracy demands that the XY stage be accurately positioned and that the load plate be loaded in a stable and repeatable manner. By positioning the mask or wafer in each of the exposed areas of the light path system, the stage completes the step-and-repeat function of the electron beam system. The positioning accuracy of the workpiece stage is strictly limited by the small geometry that the system may achieve. Loading plywood is a framework. It can hold the substrate. It provides a method of placing a substrate on a workpiece stage and protecting the substrate during loading and unloading as well as bringing the patterning surface into electrical contact with the workpiece stage.