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Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips.Film thickness is about 50 nm.Auger electron spectroscopy (AES) was used to evaluate nitrogen content,and increasing N_2 flow improved N content from 0 to 7.6%.Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal N-sp~3C and N-sp~2C structure.With increasing the N~2 flow,sp~3C decreases from 73.74% down to 42.66%,and so does N-sp~3C from 68.04% down to 20.23%.The hardness decreases from 29.18 GPa down to 19.74 GPa,and the Young’s modulus from 193.03 GPa down to 144.52 GPa.
Nitrogen doped diamond-like carbon (DLC: N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Fermi thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content , and increasing N_2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal N-sp ~ 3C and N-sp ~ 2C structure. 3C decreases from 73.74% down to 42.66%, and so does N-sp ~ 3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young’s modulus from 193.03 GPa down to 144.52 GPa.