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随着信息技术的发展对高密度波分复用（ＤＷＤＭ）滤光片的需要越来越大。而高精度高性能的光学薄膜膜厚监控系统是制备ＤＷＤＭ 滤光片的关键。文中论述了所建立的制备用于１００ＧＨｚ～５０ＧＨｚ ＤＷＤＭ 滤光片的高精度高性能的光学薄膜膜厚监控系统。该系统的波长分辨力为０．１ｎｍ ，重复性精度为±０．０５ｎｍ 。信噪比与温度漂移特性分别为±０．０１％ 和０．０５％ ／ｈ。还论述了该系统的实际实验结果。
With the development of information technology, there is an increasing need for high-density wavelength division multiplexing (DWDM) filters. The high-precision optical film thickness monitoring system is the key to the preparation of DWDM filters. The paper discusses the fabrication of high precision optical film thickness monitoring system for 100GHz ~ 50GHz DWDM filter. The system has a wavelength resolution of 0.1 nm and reproducibility of ± 0.05 nm. Signal to noise ratio and temperature drift characteristics were ± 0.01% and 0.05% / h. Also discussed the actual experimental results of the system.