论文部分内容阅读
SiC纤维增强钛基复合材料(SiCf/Ti)具有优良的力学性能,是航空领域重要的高温结构材料;高质量的先驱丝(带金属涂层的SiC纤维)是研制复合材料的关键,而这主要受溅射工艺的影响。本文采用磁控溅射法沉积TC17合金涂层,研究了沉积过程中溅射偏压对涂层生长情况的影响规律,通过X射线衍射、俄歇电子、扫描电镜、表面轮廓仪和纳米压痕仪分别对涂层的晶体结构、成分、微观形貌、应力、弹性模量及硬度进行了分析。结果表明溅射偏压对合金涂层应力影响显著,随着负偏压的增大,涂层应力由张应力向压应力转变;由于压应力有利于涂层与纤维的结合,因此在高偏压下涂层与纤维的结合情况较好且生长致密;而偏压对涂层组成物相和弹性模量的影响较小;涂层硬度随负偏压的增大总体呈现增大的趋势。
SiC fiber reinforced titanium matrix composites (SiCf / Ti) have excellent mechanical properties and are important high temperature structural materials in the aviation field. High quality precursor fibers (SiC fibers with metal coating) are the key to the development of composites Mainly affected by the sputtering process. In this paper, the TC17 alloy coating was deposited by magnetron sputtering and the effect of sputtering bias on the growth of the coating was studied. The effects of sputtering bias on the growth of the coating were investigated by X-ray diffraction, Auger electron, scanning electron microscopy, surface profiler and nanoindentation The crystal structure, composition, microstructure, stress, elastic modulus and hardness of the coating were analyzed respectively. The results show that the sputtering bias has a significant effect on the stress of the alloy coating. As the negative bias increases, the stress of the coating changes from tensile stress to compressive stress. Because the compressive stress is beneficial to the combination of the coating and the fiber, The bonding between the coating and the fiber is better and the growth is more dense. The bias voltage has little effect on the phase and elastic modulus of the coating. The hardness of the coating tends to increase with the increase of the negative bias.