利用Nd:YAG脉冲激光器冲击划痕物理气相沉积(PVD)工艺制备的无约束层的TiN薄膜涂层,研究涂层受冲击后残余应力状况,并分析冲击应力波对涂层结合强度的影响。研究表明,随着冲击划痕的激光功率密度逐渐增大,涂层表面原来的残余压应力显著减小,并在受激光冲击作用大的地方还产生了逐渐增大的残余拉应力;研究还表明,激光冲击涂层时产生的应力波对涂层的结合强度有明显的影响,当激光功率密度足够大时,产生的强大冲击应力波会导致涂层与界面间发生明显的翘起开裂和脱落。 Unconstrained TiN thin film coatings prepared by impact-induced physical vapor deposition (PVD) by Nd: YAG pulsed laser were used to study the residual stress after impact. The influence of impact stress wave on the bonding strength of the coating was also analyzed. The results show that as the laser power density of the impact scratch increases, the original residual compressive stress on the surface of the coating decreases significantly, and the residual tensile stress increases gradually due to the laser shock. It is shown that the stress wave produced by laser shock coating has a significant influence on the bonding strength of the coating. When the laser power density is large enough, the strong impact stress wave produced will cause obvious cracking and cracking between the coating and the interface Off.