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对不同温度真空退火的大厚度TiAlN涂层(厚度为65.3μm)的硬度、结合强度、残余应力、摩擦磨损等力学性能进行了系统的研究,以揭示真空退火工艺对大厚度涂层力学性能的影响规律。结果表明,随着退火温度增加,涂层应力得到释放,600℃退火后全膜厚平均应力降至-0.154 GPa,应力沿层深分布更加均匀,涂层硬度逐渐下降,但仍保持较高硬度值,膜基结合强度增强,磨损率略有上升。
The mechanical properties such as hardness, bond strength, residual stress, friction and wear of large thickness TiAlN coating annealed at different temperatures and vacuum annealed (thickness 65.3μm) were systematically studied to reveal the effect of vacuum annealing on the mechanical properties of large thickness coatings Affect the law. The results show that as the annealing temperature increases, the stress of the coating is released. After annealing at 600 ℃, the average stress of the whole film decreases to -0.154 GPa. The distribution of stress along the layer is more uniform and the hardness of the coating decreases gradually. However, Value, film-based bonding strength increased, the wear rate increased slightly.