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为了提高太阳集热器的集热效率 ,必须抑制透明盖板表面的反射 ,纳米多孔 Si O2 薄膜可以达到宽带减反射效果。理论分析获得了优化的纳米多孔复合 Si O2 宽带减反膜的光学参数 ,实验上通过 TEOS水解与缩聚反应 ,控制不同的催化剂、反应剂配比等条件 ,成功获得了不同颗粒的 Si O2溶胶 ,制得具有折射率可调的 sol- gel薄膜以及台阶折射率变化的双层纳米复合 Si O2 薄膜。薄膜的光学参数采用椭偏仪和台阶仪进行测量 ,薄膜形貌特征及结构通过 SEM观测 ,基底和薄膜的反射率则用分光光度计测量。在 30 0— 2 5 0 0 nm波段内玻璃表面的平均反射率 ,从未镀膜的 0 .0 6 9降低到镀膜后的 0 .0 12 ,实验结果与理论计算基本吻合。
In order to improve the heat collecting efficiency of the solar collector, the reflection on the surface of the transparent cover must be suppressed, and the nano-porous Si O2 film can achieve broadband antireflection effect. The optical parameters of the optimized nanoporous composite Si O2 broadband anti-reflection film were obtained theoretically. In the experiment, different particles of Si O2 sol were successfully obtained through the hydrolysis and polycondensation reaction of TEOS, the control of different catalysts and the ratio of reactants. A two-layered nanocomposite Si O2 thin film with a refractive index adjustable sol-gel film and a step-index change was obtained. The optical parameters of the films were measured by ellipsometry and stepmetry. The morphology and structure of the films were observed by SEM. The reflectance of the substrates and films was measured by spectrophotometer. The average reflectivity of the glass surface in the range of 30 0-25 0 0 nm decreased from 0. 069 uncoated to 0. 0 12 after the coating, and the experimental results are in good agreement with theoretical calculations.