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形状记忆合金 /硅复合膜驱动的微泵由一个可形变腔体和两个单向硅薄片阀组成。微驱动膜利用NiTi形状记忆合金薄膜相变时具有大的可回复应力和Si衬底膜的反偏置力 ,产生双向往复振动。采用图形化的NiTi薄膜作为热诱发相变的加热电阻 ,有效地提高了动态响应频率 ,同时降低了驱动功率。通过驱动结构的优化设计 ,增加了驱动位移和工作寿命。微泵采用Si表面和立体微加工工艺、金 -硅共晶键合等技术制备。它的外形尺寸为 6mm× 6mm× 1 .5mm ,最大输出流量为 340 μl/min ,最高驱动频率为 1 0 0Hz,往复振动次数大于 4× 1 0 7次
The shape memory alloy / silicon composite membrane driven micro pump consists of a deformable cavity and two unidirectional silicon wafer valves. The micro-driven membrane utilizes the large recoverable stress and the reverse biasing force of the Si substrate membrane during the phase transition of the NiTi shape memory alloy thin film to generate bidirectional reciprocating vibration. The graphitized NiTi thin film is used as the heating resistor for the heat-induced phase change, which effectively improves the dynamic response frequency and reduces the driving power. By driving the optimal design of the structure, increased drive displacement and working life. Micro-pump using Si surface and three-dimensional micro-processing technology, gold-silicon eutectic bonding and other technology preparation. Its dimensions are 6mm × 6mm × 1 .5mm, the maximum output flow of 340 μl / min, the maximum drive frequency of 100Hz, the number of reciprocating vibration is greater than 4 × 107 times