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1.前言在诸如激光处理、光学存储器件、摩擦热或燃烧室的热性能研究的许多技术领域,测量表面温度的变化是至关重要的。为了获得快速响应时问和高空间分辨率,有必要减小温度传感器的尺寸。此项应用采用薄膜电阻和热电偶传感器是最理想。对达到极限尺寸(≤1μm),电阻传感器的灵敏度下
1. Introduction In many areas of technology, such as laser processing, optical storage devices, frictional heat, or thermal performance studies of combustion chambers, measuring changes in surface temperature is of paramount importance. In order to obtain fast response time and high spatial resolution, it is necessary to reduce the size of the temperature sensor. Thin film resistors and thermocouple sensors are ideal for this application. To the limit size (≤ 1μm), the sensitivity of the resistance sensor