硅集成电路制作用的气体 表1给出的气体,是硅IC芯片制作工艺用的主要气体。这些气体有的富有反应性,有的毒性强烈。因此,应充分掌握这些气体的性质,一旦使用不当,就将发生意想不到的事故.从半导体工厂以前发生事故的事例中得知,由气体引起的事故,虽然比酸、溶剂剂发生的次数要少,但却存在着寄生大事故的危险性。 气体的性质 Gas for Silicon Integrated Circuits The gas shown in Table 1 is the main gas used in the silicon IC chip fabrication process. Some of these gases are highly reactive and some are highly toxic. Therefore, we should fully grasp the nature of these gases, once used improperly, there will be unexpected accidents.From the semiconductor factory accident occurred in the previous case learned that the gas-caused accidents, although the acid than the number of solvent to occur Few, but there is the risk of parasitic accidents. The nature of the gas