针对半导体器件模型参数局部优化的提取策略及其实现方法，提出了采用语言描述策略的观点，设计了具体的策略描述语言。用户可通过策略描述语言确定局部优化时参数提取的步骤和流程。这种语言与具体的物理模型无关，与不同的参数提取软件的数据输入格式无关，仅与模型在参数提取软件中的外部接口有关。因而可适用于各种半导体器件模型参数提取软件。这种方式因其参数提取策略和测量数据分离存储，相对于传统的参数提取策略和测量数据绑定存储，有更好的可重用性并更易于维护。 Aiming at the optimization strategy of local extraction of semiconductor device model parameters and its implementation method, a viewpoint of using language description strategy is proposed and a specific strategy description language is designed. The user can determine the steps and flow of parameter extraction in local optimization through the policy description language. This language has nothing to do with the specific physical model, has nothing to do with the data input format of different parameter extraction software, only with the external interface of the model in the parameter extraction software. It can be applied to a variety of semiconductor device model parameter extraction software. This approach, because of its parameter extraction strategy and measurement data, is stored separately and is better reusable and easier to maintain than traditional parameter extraction strategies and measurement data binding storage.