论文部分内容阅读
采用热灯丝化学气相沉积法在硅衬底上沉积出金刚石薄膜，用傅立叶变换红外光谱仪分析独立式金刚石薄膜的红外光谱特性，其结果表明：在6．25μm～25μm波段，平均红外透过率为65％。由于生长的多晶金刚石薄膜粗糙表面，中红外波段出现红外散射损失。镀类金刚石薄膜后，红外散射损失可得到一定程度的改善。
The diamond film was deposited on the silicon substrate by hot filament chemical vapor deposition method. The infrared spectral characteristics of free-standing diamond films were analyzed by Fourier transform infrared spectroscopy. The results showed that the average infrared transmittance of 6.25μm ~ 25μm was 65%. Due to the rough surface of the growing polycrystalline diamond film, infrared scattering loss occurs in the mid-infrared band. After the diamond-like coating, the loss of infrared scattering can be improved to some extent.