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采用双极脉冲磁控溅射法制备氮掺杂碳膜并作为对电极应用在染料敏化太阳能电池(DSSC)中。研究了氮掺杂对碳膜的结构与性能的影响。用 X 射线光电子能谱(XPS)对氮掺杂碳膜进行薄膜表面元素分析，用四探针测试仪对氮掺杂碳膜的方块电阻进行测试，用扫描电镜对氮掺杂碳膜表面形貌进行分析。组装电池，用太阳光模拟器测试电池的光电转化率。研究结果表明，经过氮掺杂的碳膜，表面形貌致密，当N2的体积分数为30%时，薄膜中 N 元素含量为15.21%，薄膜的方块电阻为9.4Ω/□，电池的光电转化率为1.16%。“,”The nitrogen-doped carbon film was prepared by bipolar pulsed magnetron sputtering as counter elec-trode in dye-sensitized solar cells(DSSC).The structures and properties were investigated.The surface elemen-tal of nitrogen-doped carbon film was analyzed by X-ray photoelectron spectroscopy.The sheet resistance of ni-trogen-doped carbon film was detected by four point probe.The surface morphologies were observed by scan-ning electron microscopy.The performance of DSSC was tested by solar simulator after the cell built up.The results indicated that the surface morphology of nitrogen-doped carbon film was high density,when volume fraction of nitrogen was 30%,the nitrogen content in the film was 15.21%,the sheet resistance was 9.4Ω/□. The counter electrode exhibited a good photovoltaic performance,the efficiency reached 1 .1 6%.