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为解决超精密光学仪器要求兼顾超低固有频率和超低振动速度的问题,提出了一种基于复合摆-倒摆串联的超低频气浮隔振方法。利用单摆和倒摆的水平刚度作用相反、相互抵消的特性,将二者串联,研制了能够与气浮隔振系统组合使用的复合摆-倒摆串联水平隔振装置,并对其进行了建模、仿真和实验分析。实验结果表明:采用本文提出的隔振方法,气浮隔振系统的水平固有频率由2Hz降至1Hz;在同等条件下,本方法节省约36%的安装高度;水平短轴方向的速度1/3倍频程谱幅值低于1.53μm/s,达到IEST通用评价标准的VC-F隔振等级,水平长轴方向的速度1/3倍频程谱幅值低于2.17μm/s,优于VC-E隔振等级。
In order to solve the problem of ultra-low-precision optical instruments, taking into account the ultra-low natural frequency and ultra-low vibration speed, an ultra-low frequency flotation vibration isolation method based on compound pendulum-pendulum tandem system is proposed. By using the characteristics that the horizontal stiffness of the pendulum and the inverted pendulum reverse and cancel each other, the two are connected in series, and the compound pendulum and reciprocating horizontal vibration isolation device which can be used in combination with the air-float vibration isolation system is developed and carried out Modeling, simulation and experimental analysis. The experimental results show that the method proposed in this paper can reduce the natural frequency of air-flotation vibration isolation system from 2Hz to 1Hz. Under the same conditions, this method can save about 36% of the installation height. The horizontal short-axis speed 1 / 3 octave spectral amplitude less than 1.53μm / s, IEST universal evaluation standard VC-F vibration isolation level, horizontal long axis direction 1/3 octave spectral amplitude less than 2.17μm / s, excellent Vibration isolation level in VC-E.