论文部分内容阅读
A guided-mode resonance(GMR) filter with the same material(Ta_2O_5) for both the grating layer and the waveguide layer is designed and fabricated.This simple structure is easy to fabricate and can avoid the defects at the grating/waveguide interface using different materials.The spectral response measured with a Lambda 900 spectrophotometer under normal incidence for TE waves exhibits a peak reflectance exceeding 80%at the wavelength of 1040 nm with a full-width half-maximum(FWHM) linewidth of 23 nm.We evaluate the deviations of the fabricated structure from the designed parameters.
A guided-mode resonance (GMR) filter with the same material (Ta_2O_5) for both the grating layer and the waveguide layer is designed and fabricated. This simple structure is easy to fabricate and can avoid the defects at the grating / waveguide interface using different materials. The spectral response measured with a Lambda 900 spectrophotometer under normal incidence for TE waves exhibits a peak reflectance exceeding 80% at the wavelength of 1040 nm with a full-width half-maximum (FWHM) linewidth of 23 nm. We evaluate the deviations of the fabricated structure from the designed parameters