研制成功的动态流量法超高真空标准装置是一台用来校准真空规的绝对真空计量标准。装置由校准系统、微流量计系统、抽气系统和计算机控制系统组成。校准系统采用四球结构 ,校准球室直径为50 0mm。极限真空度为 6 5× 10 - 9Pa ,校准范围为 10 - 2 ～ 10 - 7Pa ,不确定度为 3% (10 - 2 ～ 10 - 6 Pa)和10 % (10 - 7Pa)。 The successful development of the dynamic flow method ultra-high vacuum standard device is an absolute vacuum measurement standard used to calibrate the vacuum gauge. The device consists of a calibration system, a microfluidic system, a suction system and a computer control system. Calibration system uses four-ball structure, calibration ball room diameter 50 0mm. The ultimate vacuum is 6 5 × 10 - 9 Pa, the calibration range is 10 - 2 ~ 10 - 7 Pa, and the uncertainty is 3% (10 - 2 ~ 10 - 6 Pa) and 10% (10 - 7 Pa).