论文部分内容阅读
研究了具有混合型 I- V特性的静电感应晶体管 ,提出了实现混合 I- V特性所必需的器件结构参数、材料参数和工艺参数之间的最佳匹配关系 .工艺实践表明沟道尺寸在确定器件特性是混合型、类三极管型还是类五极管型方面有着重要作用 .讨论了静电感应晶体管性能控制的一般原则、方法和制造参数的控制判据以及控制因子 β的作用 .研究结果对静电感应晶体管的设计和制造 ,特别对具有混合型 I- V特性的静电感应晶体管有实用价值 .
The electrostatic induction transistors with mixed I-V characteristics were studied and the best match between the device structure parameters, the material parameters and the process parameters necessary to achieve the mixed I-V characteristics was proposed.The process practice shows that the size of the channel in determining the device The characteristics of which are mixed, triode or quasi-pentode type.It discusses the general principles, methods and control criterions of manufacturing parameters and the effect of control factor β on the performance control of the electrostatic induction transistor.The results of the research on the electrostatic induction transistor Designed and manufactured, especially for electrostatic induction transistors with mixed I-V characteristics.