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根据非平衡热力学耦合模型计算得到了碳氢氟和碳氢氯体系低压金刚石生长的非平衡定态相图，计算结果与大量实验事实符合良好，可以为实验研究提供理论指导。还详细讨论了卤素原子在金刚石薄膜淀积过程中的作用。
According to the non-equilibrium thermodynamic coupling model, the non-equilibrium stationary phase diagram of the low-pressure diamond growth of hydrofluorocarbons and hydrocarbon-chlorine systems was calculated. The calculated results are in good agreement with a large number of experimental facts, which can provide theoretical guidance for experimental research. The role of halogen atoms in the diamond film deposition process is also discussed in detail.