激光器在工业加工中的应用越来越广泛，其中医疗器械的微加工、电子元件的封装、塑料的永久性冷标刻以及微型部件立体成型等应用的增长速度最快。以往，准分子激光器曾经是此类应用中主要的和首选的激光源。随着结构紧凑、具有高平均功率、高可靠性、操作简便的半导体泵浦固体 Applications of lasers in industrial processing are becoming more and more widespread. Applications such as micromachining of medical devices, packaging of electronic components, permanent cold marking of plastics, and three-dimensional formation of micro-components are the fastest growing ones. In the past, excimer lasers were once the major and preferred laser source for such applications. With a compact structure, high pump power, high reliability and easy-to-use semiconductor pump solids