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在研究动态主动调焦法测量原理的基础上,提出一种新型的动态主动调焦式激光测头的检测方法。该检测方法的核心原理是将位移量的测量转换成了时间差的测量,从而简化了激光测头的结构,提高了激光测头的测量精度和稳定性。介绍了所设计的高精度激光测头测量系统,并对激光测头进行了动态特性的实验。结果表明激光测头的测量分辨力为0 .075μm,测量线性度为0. 45μm,测量范围为±0 .1 mm。
On the basis of studying the measurement principle of dynamic focusing method, a new detection method of dynamic active focusing laser probe is proposed. The core principle of this method is to convert displacement measurement into time difference measurement, which simplifies the structure of laser probe and improves the measurement accuracy and stability of laser probe. Introduced the design of high-precision laser probe measurement system, and the laser probe dynamic characteristics of the experiment. The results show that the laser probe measurement resolution of 0. 075μm, measuring linearity of 0. 45μm, measuring range of ± 0.1mm.