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目前,实用而可靠的激光系统已可用于微电子工业。本文主要描述激光束与物质的相互作用,激光器的重要特性,以及掺钕钇铝石榴石(Nd:YAG)和二氧化碳(Co_2)激光器的重要特性数据,上述两种激光器已经证明是工业中的两名干将。然后指出焊接,钻孔和划片等工作需要多大的能量和(?)冲宽度,且概要地说明物质加工的能量学。当微电子工业和激光工业成熟时,这些和其他方面的新的应用,肯定会利用激光束加工的。
Currently, practical and reliable laser systems are already available for the microelectronics industry. This article describes the interaction of laser beams with materials, the important properties of lasers, and the important characteristic data of neodymium-doped yttrium aluminum garnet (Nd: YAG) and carbon dioxide (Co_2) lasers, both of which have proven to be two Well-known. It then points out how much energy and (?) Punch widths are required for welding, drilling and scribing, and gives an overview of the energetics of material processing. These and other new applications will surely be processed with laser beams as the microelectronics industry and the laser industry mature.