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NY-1型电化学C-V自动测试仪是用于半导体外延层载流子浓度纵向分布的测量。由电解液/半导体结电容的测量获得载流子浓度。由结电容及腐蚀时流过结的电量可获得对应的深度。交替进行电容、电流测量即可获得载流子浓度纵向分布。该测试仪将电容电流测量、数据处理、结果输出等测试过程由计算机自动进行。已成功地在沪、杭、宁多家用户的砷化镓外延片进行测量并通过江苏省科委的鉴定。鉴定委员会认为“NY-1型电化学C-V自动测试仪”总体设计与单元设计合理。电化学室、恒电位仪、光照系统等单元性能良好。整机各部分工作协调、性能稳定,在国内处于领先地位,已成功地用于砷化镓外延片的测试。对载流子浓度10~(15)～10~(19)cm~(-3)砷化镓材料的分析结果与进口设备PN4200型的分析数据基本相同,可满足实用要求代替进口。本文除对该测试仪的原理、软件及硬件进行描述分析外,还对电解液/砷化镓结特性进行了研究。
NY-1 electrochemical C-V automatic tester is used to measure the longitudinal distribution of the semiconductor epitaxial layer carrier concentration. Carrier concentration was obtained from the measurement of electrolyte / semiconductor junction capacitance. The corresponding depth can be obtained from the junction capacitance and the amount of current flowing through the junction during corrosion. Alternate capacitance and current measurements to obtain vertical distribution of carrier concentration. The tester will be capacitive current measurement, data processing, the results of the test output by the computer automatically. Has been successfully in Shanghai, Hangzhou, Nanjing and more users of gallium arsenide epitaxial films were measured and passed the identification of Jiangsu Provincial Science and Technology Commission. Accreditation Committee that the “NY-1 electrochemical C-V automatic tester,” the overall design and unit design is reasonable. Electrochemical chamber, potentiostat, lighting system, such as unit performance is good. Work coordination of all parts of the machine, stable performance, a leading position in the country, has been successfully used for GaAs epitaxial wafers test. The results of the analysis of gallium arsenide with carrier concentration of 10-15 cm ~ (10) ~ (19) cm ~ (-3) are basically the same as that of PN4200 type imported equipment, which can meet the practical requirements instead of imported. In addition to the description of the principle, software and hardware of the tester, the characteristics of electrolyte / gallium arsenide junction are also studied.