论文部分内容阅读
通过与长度溯源三轴激光干涉仪测量系统结合,设计开发计量型动态模式原子力显微镜(AFM)。此AFM系统中,三轴激光干涉仪系统用于实时测量AFM测头与试样的相对位移。激光干涉仪系统的x,y,z测量轴正交于AFM探针顶端附近的一点,基本可以避免系统的阿贝误差,使AFM具有极高的测量精度。除此之外,扫描过程中三轴激光干涉仪系统还用于工作台x,y方向位移的反馈控制,完全克服AFM中压电器件的缺陷对水平尺寸测量的影响。分析表明.在对纳米标准栅的平均栅距测量中,AFM系统达到亚纳米的测量精度。
Through the combination of length-traceable three-axis laser interferometer measurement system, the design and development of dynamic mode AFM (AFM) was designed and developed. In this AFM system, a three-axis laser interferometer system is used to measure the relative displacement of the AFM probe and the specimen in real time. Laser interferometer system x, y, z measurement axis orthogonal to the AFM probe near the top of a point, the basic system to avoid the Abbe error, so that AFM has a very high measurement accuracy. In addition, the three-axis laser interferometer system during the scanning process is also used for the feedback control of the displacements in the x and y directions on the workbench, so as to completely overcome the influence of the defects of the piezoelectric devices in the AFM on the horizontal dimension measurement. The analysis shows that the AFM system achieves the subnanometer measurement accuracy in the average pitch measurement of the nanometer standard grid.