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基于SU-8和BPN紫外负性感光胶,结合微电镀工艺加工制作射频同轴传输线,以实现射频器件信号的传输与耦合。首先确定在阻抗匹配情况下同轴传输线特性阻抗为50Ω的同轴传输线的具体尺寸,然后通过HFSS仿真软件对设计的结构进行模拟仿真。通过仿真结果验证设计的可行性,采用紫外光刻技术利用SU-8光刻胶做出内导体支柱,并用BPN光刻胶做出结构,对结构进行电镀。最后将BPN光刻胶剥离,即可得到射频同轴传输线。此方法制得的同轴传输线具有介质损耗小、辐射损耗小、无色散、带宽大和抗干扰强的优点,适用于高性能射频和微波电路。另外,它的制作工艺能与其他射频和微波器件及集成电路工艺兼容,便于与射频和微波电路集成。
Based on SU-8 and BPN UV negative photosensitive adhesive, micro-electroplating process combined with the production of RF coaxial transmission line, in order to achieve the RF signal transmission and coupling devices. First of all, the specific size of the coaxial transmission line whose characteristic impedance of coaxial transmission line is 50Ω under the condition of impedance matching is determined, and then the structure of the design is simulated by HFSS simulation software. The feasibility of the design was verified by the simulation results. The inner conductor was made of SU-8 photoresist by UV lithography. The structure was made by BPN photoresist and the structure was electroplated. Finally BPN photoresist stripping, you can get RF coaxial transmission line. The coaxial transmission line obtained by the method has the advantages of small dielectric loss, small radiation loss, no dispersion, large bandwidth and strong anti-interference, and is suitable for high-performance radio frequency and microwave circuits. In addition, its production process can be compatible with other RF and microwave devices and integrated circuit technology, easy to integrate with RF and microwave circuits.