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本文以低浓度掺杂,圆形膜硅杯式悬浮封装结构的力敏感元件为基础,阐述其设计工艺及补偿技术中的有关问题.
In this paper, based on the force-sensitive components of low-concentration doping and circular membrane silicon-cup suspension package, the design process and compensation technology are expounded.