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采用阴极弧离子镀法在H13钢表面制备Ti Al Si N涂层,通过SEM对Ti Al Si N涂层表面和界面形貌进行了观察,通过EDS和XRD对其化学元素和物相进行了分析,利用划痕法测定了其结合强度,并对其界面结合机理进行了探讨。结果表明:Ti Al Si N涂层表面主要成分为Ti、Al、Si和N元素,各元素分布均匀,未产生富集现象;高硬度的Ti Al N是由Al原子以置换方式取代Ti N中部分Ti原子生成的,且Ti N和Al N晶粒得到细化,形成较为致密的结构,使涂层硬度得到了提高;Ti、Al、Si、N等原子在结合界面处发生相互扩散,是形成冶金结合的主要机制;Ti Al SN涂层/H13钢体系具有较好的结合强度,用划痕法测得涂层界面结合强度为44 N。
TiAl Si N coating was prepared on the surface of H13 steel by cathodic arc ion plating method. The surface and interface morphology of TiAl Si N coating were observed by SEM. The chemical elements and phases were analyzed by EDS and XRD , The bond strength was measured by scratch method, and the interface bonding mechanism was discussed. The results show that the main components of TiAl Si N coating are Ti, Al, Si and N elements, and the elements are distributed uniformly without enrichment. TiAlN with high hardness is substituted by Al atoms in TiN Some Ti atoms, and the TiN and AlN grains are refined to form a denser structure, resulting in an increase in the hardness of the coating; atoms such as Ti, Al, Si, N and the like interdiffuse at the bonding interface and are Forming the main mechanism of metallurgical bonding; Ti Al SN coating / H13 steel system has a good bonding strength, measured by scratching the coating interface bonding strength 44N.