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在研制基于微型光机电系统技术的光电器件过程中,需要精确测定器件在给定驱动条件下的运动情况。在对制作完成的光开关进行性能测试时,由于微型光机电系统光开关的几何尺寸的限制,如果要准确测定光开关微反射镜的运动位移,将会有一定的困难。提出了一种采用线阵CCD技术的光学测量方法,实现了对光开关悬臂梁在驱动电压作用下的旋转角度的精确测量。通过理论推导得到了悬臂梁扭转角度与可测量物理量的关系,通过求解方程得到了各个物理量的数值选择对于测量结果的影响,并且给定了测量时各个物理量的参考值。通过实验测量,误差小于10%,表明这是一种具有实际意义的测量方案。
In the development of optoelectronic devices based on micro-opto-electro-mechanical system technology, it is necessary to accurately measure the device’s motion under a given driving condition. When performing the performance test on the completed optical switch, there is a certain difficulty in accurately determining the movement displacement of the optical switch micromirror due to the limitation of the optical switch size of the micro-optical electro-mechanical system. An optical measurement method using linear CCD is proposed, which can accurately measure the rotation angle of the optical switch cantilever under the driving voltage. The relationship between torsion angle and measurable physical quantity was deduced through theoretical derivation. The influence of the numerical choice of each physical quantity on the measurement results was obtained by solving the equations, and the reference value of each physical quantity was given. Through experimental measurements, the error is less than 10%, indicating that this is a practical measurement program.