一、前言作者过去曾在有关学术会议介绍过一种小型电感式位移传感器。这种传感器对微型致冷机的位移测量是比较合适的,它的精度和量程等指标也能满足一般微型致冷机对位移测量的要求,而且测量线路简单,成本低。例如对12毫米位移量的测量,保证最大非线性误差在±1%左右的精度之下,传感器外型的轴向尺寸只有40毫米,径向尺寸为10毫米,便于满 I. Preface The author has in the past introduced a small inductive displacement sensor in the relevant academic conference. This kind of sensor is suitable for the displacement measurement of miniature refrigerator, its accuracy and range and other indicators can also meet the requirements of the general micro-refrigerator displacement measurement, and the measurement line is simple and low cost. For example, the displacement of 12 mm measurement, to ensure that the maximum nonlinear error of ± 1% accuracy, the sensor size of the axial dimension of only 40 mm, the radial size of 10 mm, easy to full