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美国Ａｃｔｏｎ研究公司研制的深紫外光学膜层在用准分子激光脉冲照射时显示出从未有过的长寿命。这类膜层是半导体制造中应用的照相制版系统的重要元件。该公司为１９３ｎｍ的４５°入射设计和制作的高反射器（ＨＲ）膜层的长时间辐照表明，其寿命在能量密度为３０～４０ｍｊ
Acton research company developed the United States deep UV optical coating with excimer laser pulse irradiation showed an unprecedented long life. Such films are important components of photolithography systems used in semiconductor manufacturing. The long exposure of the company to a high reflectance (HR) film designed and fabricated for a 193 nm 45 ° incidence shows that the lifetime of the high reflectivity (HR) film at energy density 30 to 40 mj