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高能准分子激光器对于激光微加工来说具有极佳的灵活性,因为实际上每种加工的材料都应该具有准确高分辨率的材料烧蚀特性,并且不需要后续处理。紫外激光器直接输出需要的上转换能级的紫外(UV)光子很容易达到几百瓦的功率输出,这对于制造加工的高生产力和大规模生产是很关键的。特别是大平顶准分子激光的外形非常适合于两维和三维微加工的高效并行加工。还将介绍特别适合于材料烧蚀和表面活化的紧凑微加工概念。
High-energy excimer lasers are extremely flexible for laser micromachining because virtually every material processed should have accurate, high-resolution material ablation without the need for subsequent processing. Ultraviolet lasers directly output the required upconversion UV photons to easily reach hundreds of watts of power output, which is critical for high productivity and mass production in manufacturing processes. In particular, the shape of the Dopod excimer laser is ideal for efficient parallel processing of both 2D and 3D micromachining. It will also introduce the compact micromachining concept that is particularly well suited for material ablation and surface activation.