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对(CH_8)_nSiCl_(4-n)(n=1,2,3)以及CH_8SiHCl_2是否可做为激光法制备SiC粉末的原料问题做了研究。结果表明,仅(CH_3)_8SiCl在试验条件下生成具有理想性能的SiC超微粒。对产物的性能也进行了分析。
(CH_8) _nSiCl_ (4-n) (n = 1,2,3) and CH_8SiHCl_2 can be used as raw materials for the preparation of SiC powder by laser method. The results show that (CH_3) _8SiCl only produces SiC ultrafine particles with ideal properties under the experimental conditions. The performance of the product was also analyzed.