论文部分内容阅读
报道了利用准分子脉冲激光淀积技术在(001)和(012)蓝宝石衬底上制备LiTaO_3光波导薄膜的实验研究。利用X光衍射和Raman光谱术鉴定所生长薄膜的微结构,研究了脉冲能量、衬底温度、氧分压和淀积室几何等因素对薄膜质量的影响。结果表明脉冲能量和衬底温度对薄膜生长的择优取向有很大影响,而氧分压和淀积室的几何配置主要影响薄膜的生长动力学。在合适的工艺条件下制备出了优质的外延膜,薄膜显示了优异的光波导性能。
Reported the preparation of LiTaO 3 optical waveguide films on (001) and (012) sapphire substrates by using an excimer pulsed laser deposition technique. The microstructure of the as-grown films was characterized by X-ray diffraction and Raman spectroscopy. The effects of pulse energy, substrate temperature, oxygen partial pressure and deposition chamber geometry on the film quality were studied. The results show that the pulse energy and the substrate temperature have a great influence on the preferred orientation of the film growth. The oxygen partial pressure and the geometry of the deposition chamber mainly affect the growth kinetics of the film. The excellent epitaxial film is prepared under suitable process conditions, and the film shows excellent optical waveguide performance.