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MEMS 和微系统器件可以说已成为纳米技术领域的产品。目前,MEMS 最先进的技术是 Sandia 公司的超平面5层多晶硅表面微机械 MEMS 技术,可以使MEMS 和微系统器件的复杂性和功能性得到很大提高。MEMS 和微系统器件在武器系统中具有重要的应用价值。但在武器系统中使用之前,必须使它们商业化,以验证其可生产性和可靠性。MEMS 的商业化应用主要在消费电子领域。据《EP&P》杂志2001年第4期报道,高档消费电
MEMS and micro-system devices can be said to have become the product of nanotechnology. Currently, MEMS's state-of-the-art technology is Sandia's ultra-planar, 5-layer polycrystalline silicon MEMS technology that dramatically increases the complexity and functionality of MEMS and microsystem devices. MEMS and microsystem devices have important application value in the weapon system. Before being used in weapon systems, however, they must be commercialized to verify their producibility and reliability. MEMS commercial applications mainly in the field of consumer electronics. According to “EP & P” magazine in 2001 No. 4 reported that high-end consumer electronics