近十几年以来,国内外广泛地进行了电子束技术在工业中的应用研究.其中,一部分已经成功地用于实际生产中,例如:电子束蒸发、电子束焊接以及利用扫描电子显微镜观察材料及器件特性等. 随着科学技术的发展,国内外对于电子束技术在微电子器件制造中的应用也相当重视.一些技术比较先 In recent ten years, extensive research has been carried out on the application of electron beam technology in the industry at home and abroad, some of which have been successfully used in practical production, such as electron beam evaporation, electron beam welding and observation of materials by scanning electron microscopy And device characteristics, etc. With the development of science and technology, the application of electron beam technology in the manufacture of microelectronic devices is also emphasized at home and abroad.