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通过介绍蓝宝石衬底上生长氮化铟(InN)单晶薄膜的发展历程,阐述了生长该单晶薄膜的几种方法及生长过程中存在的一些问题和改进措施,说明了生长高质量InN单晶薄膜的有效途径,为InN的生长及应用提供了理论与技术指导。
By introducing the development history of indium nitride (InN) single crystal thin film grown on sapphire substrate, several methods for growth of the single crystal thin film and some problems existing in the growth process and the improvement measures are described. Crystal thin film of effective ways for the growth and application of InN provides a theoretical and technical guidance.