深刻蚀光栅是一个新兴的学科方向,具有亚波长和深刻蚀双重特征的微纳光子学元件,表现出一系列特有的光学效应。石英玻璃是一种优良的光学材料,具有热稳定性能好、透过率高、成本低等优点。基于石英玻璃制作深刻蚀光栅,是实现不同功能光子学器件的一种新技术途径,具有十分重要的应用前景。我们利用高密度等离子体刻蚀、半导体光刻工艺和激光全息技术,发展出石英玻璃深刻蚀技术,成功地在石英玻 Deep etching grating is a new discipline direction, with sub-wavelength and deep etching dual characteristics of micro and nano photonic elements, showing a series of unique optical effects. Quartz glass is an excellent optical material, with good thermal stability, high transmittance, low cost and so on. Fabrication of deep etching grating based on quartz glass is a new way of realizing photonic devices with different functions and has very important application prospect. Using high-density plasma etching, semiconductor lithography, and laser holography, we have developed deep-etching of quartz glass, successfully using quartz glass