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用简单的压缩空气式喷雾热分解法以醋酸镁为原料在Ｓｉ（１００） 衬底上成功地制备了（１００） 取向的ＭｇＯ 薄膜。结果表明，为获得（１００） 取向的ＭｇＯ 薄膜，衬底温度和喷雾速率是关键因素。控制实验条件，在６０００Ｃ得到了（１００） 取向的ＭｇＯ 薄膜。同时，用Ｘ 射线衍射（ＸＲＤ） 、原子力显微镜（ＡＦＭ） 和透射电镜（ＴＥＭ）对薄膜的微观结构进行了分析。
A (100) oriented MgO thin film was successfully prepared on a Si (100) substrate by a simple compressed air spray pyrolysis method using magnesium acetate as raw material. The results show that the substrate temperature and spray rate are the key factors to obtain (100) oriented MgO films. Controlled experimental conditions, (100) oriented MgO films were obtained at 6000C. The microstructures of the films were also analyzed by X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM).